Design and analysis of a 2 dimensional micro-gripper by using of rotational displacement of clamped perpendicular micro-beams due to piezoelectric actuation

Document Type : Mechanics article

Authors

1 Department of Mechanical Engineering, Makek Ashtar University of Thechnology

2 Department of mechanical engineering, Sharif University of technology, Tehran, Iran

3 Faculty of Mechanics, Malek Ashtar University of Technology, Isfahan, Iran

Abstract

As regards to daily developments in micro/nano technology and very special intricate missions in micro/nano scale, many researches focused on manipulation and movement in correspond scales. Micro-grippers are end effectors of micro/nano manipulation systems which perform some duties such as holding, picking up, moving and cutting. In this research a micro-gripper has been introduced which consists of two perpendicular Micro-beams. Each Micro-beam has an elastic layer and two piezoelectric layer. One of these piezoelectric layers is used for actuation and another one for sense and feedback control. First static equations of Micro-beam presented. Kinematics of Micro-gripper including direct and inverse kinematics and static displacement has been presented. Eventually Micro-gripper workspace for a Micro-beam’s ultimate displacement has been specified. The results have been verified by FEM software. The difference between the analytical results of displacements in different directions with the corresponding results of finite element software output is about 2 percent. Therefore, the results indicate the accuracy and efficiency of the proposed method and the current research can be a framework and foundation for the analysis of similar systems with more complex geometry.

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References

[1] C. Amici, A. Borboni, P. L. Magnani, and D. Pomi, "Kinematic analysis of a compliant, parallel and three-dimensional meso-manipulator generated from a planar structure", in Proceedings of EUCOMES 08, Springer, 2009, pp. 479-485.
[2] K. Nishiwaki, S. Kagami, Y. Kuniyoshi M. Inaba and H. Inoue “Toe joints that enhance bipedal and fullbody motion of humanoid robots”, In Robotics and Automation, Washington, DC, USA, August 2002.
[۳] امین نیکوبین، زهرا فراشی، محسن عسگری، مجتبی مرادی، «فضای کاری بهینه جابجایی دینامیکی برای ربات بازویی تک لینکی»، سال شانزدهم، شماره ۵۴ ، پائیز1397 ، صفحه 429-441.
[۴] مجید ساده دل، عقیل یوسفی کما، فائزه ایرانمنش، « بررسی اثرات تغییرات پارامترهای مفصل پنجه غیرفعال بر روی حرکت مدل دو بعدی ربات انسان نما»، سال شانزدهم، شماره 53 ، تابستان ۱۳۹۷، صفحه 157-170.
[5] Y. Tian, B. Shirinzadeh, and D. Zhang, "Design and dynamics of a 3-DOF flexure-based parallel mechanism for micro/nano manipulation", Microelectronic engineering, vol. 87, 2010, pp. 230-241.
[6] B. J. Kenton and K. K. Leang, "Design and control of a three-axis serial-kinematic high-bandwidth nanopositioner", Mechatronics, IEEE/ASME Transactions on, vol. 17, 2012, pp. 356-369.
[7] P. Ouyang, R. Tjiptoprodjo, W. Zhang, and G. Yang, "Micro-motion devices technology: The state of arts review", The International Journal of Advanced Manufacturing Technology, vol. 38, 2008, pp. 463-478.
[8] S. Nah and Z. Zhong, "A microgripper using piezoelectric actuation for micro-object manipulation", Sensors and Actuators A: Physical, vol. 133, 2007, pp. 218-224.
[9] S. Xiao, Y. Li, and X. Zhao, "Design and analysis of a novel micro-gripper with completely parallel movement of gripping arms", in Industrial Electronics and Applications (ICIEA), 2011 6th IEEE Conference on, 2011, pp. 2127-2132.
[10] F. Beyeler, A. Neild, S. Oberti, D. J. Bell, Y. Sun, J. Dual, et al., "Monolithically fabricated microgripper with integrated force sensor for manipulating microobjects and biological cells aligned in an ultrasonic field", Microelectromechanical Systems, Journal of, vol. 16, 2007, pp. 7-15.
[11] D.-H. Kim, B. Kim, and H. Kang, "Development of a piezoelectric polymer-based sensorized microgripper for microassembly and micromanipulation", Microsystem technologies, vol. 10, 2004, pp. 275-280.
 [12] R. P. Feynman, "There's plenty of room at the bottom", Engineering and science, vol. 23, 1960, pp. 22-36.
[13] T. Fukuda, F. Arai, and M. Nakajima, "Micro-Nanorobotic Manipulation Systems and Their Applications", Springer Science & Business Media, 2013.
[14] K. Uchino, "Piezoelectric actuators", Journal of Electroceramics, Vol. 20, No. 3, 2008, pp. 301-311.
[15] D. M. Eigler and E. K. Schweizer, "Positioning single atoms with a scanning tunnelling microscope," Nature, vol. 344, 1990, pp. 524-526.
[16] T. Fukuda, F. Arai, and M. Nakajima, "Micro-Nanorobotic Manipulation Systems and Their Applications",
[17] T. Tanikawa, T. Arai, P. Ojala, and M. Saeki, "Two-finger micro hand", in Robotics and Automation, 1995. Proceedings., IEEE International Conference, 1995, pp. 1674-1679.
[18] Y. Qin, "Micromanufacturing engineering and technology", William Andrew, 2010.
[19] رضا قادری، مهدی جهانگیری، احمد حقانی، سعید دانشمند، «بررسی رفتار ارتعاشی غیر خطی میکرو تیرک‌های پیزوالکتریک در برهمکنش با نانو ذرات کروی»، نشریه مدل‌سازی در مهندسی، دوره 1۵، شماره 4۸، بهار 139۶، صفحه ۸۵-۹۸.
[20] J. H. Ginsberg, "Advanced engineering dynamics", Cambridge University Press, 1998.
[21] R. G. Ballas, "Piezoelectric Multilayer Beam Bending Actuators: Static and Dynamic Behavior and Aspects of Sensor Integration", Springer, 2007.
[22] John J. Craig, "Introduction to robotics: mechanics and control", Addison-Wesley, 2005.
 
Journal of Modeling in Engineering
Volume 21, Issue 72
March 2023
Pages 123-136

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History

  • Receive Date: 28 May 2021
  • Revise Date: 26 May 2022
  • Accept Date: 04 July 2022

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