[1] W. Kronast, B. Muller, W. Siedel, A. Stoffel, "Single-chip condenser microphone using porous silicon as sacrificial layer for the air gap", Sensors and Actuators A: Physical, Vol. 87, No. 3, 2001, pp. 188–193.
[2] S. Horowitz, T. Nishida, L. Cattafesta, M. Sheplak, "Development of a micro machined piezoelectric microphone for aeroacoustics applications", the journal of the acoustical society of America, Vol. 122, No. 6, 2007, pp. 3428–3436.
[3] W.S. Lee, S.S. Lee, "Piezoelectric microphone built on circular diaphragm", Sensors and Actuators A: Physical, Vol. 144, No. 2, 2008, pp. 367–373.
[4] G. Li, Y. Zohar, and M. Wong, "Piezoresistive microphone with integrated amplifier realized using metal-induced laterally crystallized polycrystalline silicon", Journal of Micromechanics and Micro engineering, Vol. 14, No. 10, 2004, pp. 1352–1358.
[5] J. Bay, O. Hansen, S. Bouwstra, "Micromachined double backplate differential capacitive microphone", Journal of Micromechanics and Microengineering, Vol. 9, No. 1, 1999, pp. 30–33.
[6] Z.Z. Shu, M.L. Ke, G.W. Chen, R.H. Horng, et al., "Design And Fabrication of Condenser Microphone Using Wafer Transfer And Micro-electroplating Technique", Design, Test, Integration and Packaging of MEMS/MOEMS Symposium, 2008, pp. 386–390.
[7] M.D. Williams, "Development of A MEMS Piezoelectric Microphone for Aero acoustic Applications", Ph.D. dissertation, University of Florida, 2011.
[8] G. Li, Y. Zohar, and M. Wong, "Piezoresistive microphone with integrated amplifier realized using metal-induced laterally crystallized polycrystalline silicon", Journal of Micromechanics and Microengineering, Vol. 14, No. 10, 2004, pp. 1352–1358.
[9] J. Bergqvist, J. Gobet, "Capacitive microphone with a surface micromachinedbackplate using electroplating technology", Journal of Micro electro mechanical Systems, Vol. 3, No. 2, 1994, pp. 69–75.
[10] A. Torkkeli, O. Rusanen, J. Saarilahti, H. Seppa, H. Sipola, J. Hietanen, "Capacitive microphone with low-stress polysilicon membrane and high-stress polysilicon backplate", Sensors and Actuators A: Physical, Vol. 85, Nos. 1–3, 2000, pp. 116–123.
[11] A.E. Kabir, R. Bashir, J. Bernstein, J.D. Santis, R. Mathews, J.O. O’Boyle, C. Bracken; "High sensitivity acoustic transducers with thin p+ membrane and gold backplate", Sensors and Actuators A: Physical, Vol. 78, Nos. 2–3, 1999, pp. 138–142.
[12] T. Tajima, T. Nishiguchi, S. Chiba, A. Morita, M. Abe, "High-performance ultra-small single crystalline silicon microphone of an integrated structure", Microelectronic Engineering, Vols. 67–68, 2003, pp. 508–519.
[13] W. Kronast, B. Muller, W. Siedel, and A. Stoffel, "Single-Chip Condenser Microphone Using Porous Silicon as Sacrificial Layer for the Airgap", The 11th Annual International Workshop on Micro Electro Mechanical Systems 98, 1998, pp. 591–596.
150 بهینه سازی ساختارمیکروفن خازنی جدید با دیافراگم قورباغه ای جهت افزایش حساسیت و کاهش ولتاژ تغذیه
مجله مدل سازی در مهندسی سال هفدهم، شماره 59 ، زمستان 1398
[14] N. Kimori, Y. Kumai, Sh. Hishinuma, T. Ikehara, "Ten-micrometer-thick Silicon Diaphragm Used in Condenser Microphone", Key Engineering Materials, Trans Tech Publications, Vol. 538, 2013, pp. 277–280.
[15] J. Bay, O. Hansen, and S. Bouwstra, "Design of a silicon microphone with differential read-out of a sealed double parallel-plate capacitor", Sensors and Actuators A: Physical, Vol. 53, Nos. 1–3, 1996, pp. 232–236.
[16] D.T. Martin, J. Liu, K. Kadirvel, R.M. Fox, M. Sheplak, T. Nishida, "A Micromachined Dual-Backplate Capacitive Microphone for Aeroacoustic Measurements", Journal of Microelectromechanical Systems, Vol. 16, No. 6, 2007, pp. 1289–1302.
[17] P. R. Scheeper, B. Nordstrand, J. O. Gullov, B. Liu, T. Clausen, L. Midjord, "A New Measurement Microphone Based on MEMS Technology", Journal of Microelectromechanical Systems Vol. 12, No. 6, 2003, pp. 880–891.
[18] B.A. Ganji, B.Y. Majlis, "Design and fabrication of a new MEMS capacitive microphone using a perforated aluminum diaphragm", Sensors and Actuators A: Physical, Vol. 149, No. 1, 2009, pp. 29–37.
[19] C.H. Huang, C.H. Lee, T.M. Hsieh, L.Ch. Tsao, Sh. Wu, et al., "Implementation of the CMOS MEMS Condenser Microphonewith Corrugated Metal Diaphragm and Silicon Back-Plate", Sensors, Vol. 11, No. 6, 2011, pp.6257–6269.
[20] B.A. Ganji, S. Babaei Sedaghat, A. Roncaglia, L. Belsito, "Design and fabrication of high performance condenser microphone using C-slotted diaphragm", Microsystem Technologies, Vol. 24, 2018, pp. 3133–3140.
[21] N. Mohamad, P. Iovenitti, T. Vinay, "High sensitivity capacitive MEMS microphone with spring supported diaphragm – art. no. 68001T", In: Proceedings of SPIE—the international society for optical engineering, Vol. 6800, 2008.
[22] B.A. Ganji, B.Y. Majlis, "Slotted capacitive microphone with sputtered aluminum diaphragm and photo resist sacrificial layer", Micro System Technologies, Vol. 16, 2010, pp. 1803–1809.
[23] S.B. Sedaghat, B.A. Ganji, and R. Ansari, "Design and modeling of a frog-shape MEMS capacitive microphone using SOI technology", Microsystem Technologies, Vol. 24, 2018, pp. 1061–1070.
]24 [ سید مرتضی جوادپور، سعید فراهت و حسام الدین ابن الدین، "بهینه سازی یک دیفیوزر تونل باد مافوق صوت با دیواره های انعطاف
پذیر با کمک الگوریتم ژنتیک"، مجله مدل سازی در مهندسی دانشگاه سمنان، دوره 10 ، شماره 28 ، بهار 1391 ، صفحه 19 - 29.
]25 [ صابر ارمغانی، نیما امجدی، "توزیع بار اقتصادی با در نظر گرفتن آلودگی در سیستم های قدرت چندناحیه ای با استفاده از الگوریتم
بهینه سازی فاخته"، مجله مدل سازی در مهندسی دانشگاه سمنان، دوره 12 ، شماره 37 ، زمستان 1393 ، صفحه 89 - 104.
]26 [ روح الله مقصودی، یعقوب حیدری، بهزاد مشیری، " یک تحلیل مقایسهای از الگوریتمهای هوش جمعی کلونی زنبور مصنوعی و
بهینه سازی گروهی ذرات در طراحی یک کنترلکننده PID فازی کسری و پیادهسازی آن بر روی موتور DC "، مجله مدل سازی در
مهندسی دانشگاه سمنان، دوره 11 ، شماره 35 ، زمستان 1392 ، صفحه 11 - 23.
]27 [ حسین شریف زاده، نیما امجدی، " توزیع بهینه توان راکتیو با استفاده از الگوریتم بهینه سازی دسته ذرات"، مجله مدل سازی در
مهندسی دانشگاه سمنان، دوره 7، شماره 18 ، پاییز 1388 ، صفحه 67 - 73.
[28] J. Miao, R. Lin, L. Chen, Q. Zou, S.Y. Lim, S.H. Seah, "Design considerations in micromachined silicon microphones", Microelectronic Journal, Vol. 33, Nos. 1–2, 2002, pp. 21–28.
[29] P.R. Scheeper, A.G.H. Vanderdonk, W. Olthuis, P. Bergveld, "Fabrication of Silicon Condenser Microphones Using Single Wafer Technology", journal of microelectromechanical systems, Vol. 1, No. 3, 1992, pp. 147–154.
[30] P.R. Scheeper, W. Olthuls and P. Bergveld, "Improvement of the performance of microphones with a silicon nitride diaphragm and backplate", Sensors and Actuators A: Physical, Vol. 40, No. 3, 1994, pp. 179–186.
[31] A. Arora, A. Arora, V.K. Dwivedi, et al., "Zinc oxide thin film-based MEMS acoustic sensor with tunnel for pressure compensation", Sensors and Actuators A: Physical, Vol. 141, No. 2, 2008, pp. 256–261.
[32] P.C. Hsu, C.H. Mastrangelo, K.D. Wise, "A high density poly-silicon diaphragm condenser microphone", Conference Record IEEE 11th International Workshop on Micro Electro Mechanical Systems (MEMS), IEEE, 1998, pp. 580–585.
بابایی صداقت و عزیزالله گنجی 151
مجله مدل سازی در مهندسی سال هفدهم، شماره 59 ، زمستان 1398
[33] B.A. Ganjia, S. Babaei Sedaghat, Alberto Roncaglia, etc, “Design, modeling, and fabrication of crab-shape capacitive microphone using silicon-on-isolator wafer,” Journal of Micro/Nanolithography MEMS, and MOEMS, Vol. 17, No. 1, 2018, pp. 015002-9.
[34] B.A. Ganjia, S. Babaei Sedaghat, A. Roncaglia, et al., "Design and fabrication of very small MEMS microphone with silicon diaphragm supported by Z-shape arms using SOI wafer", Solid-State Electronics, Vol. 148, 2018, pp. 27–34.